nSpec® PS Cabinet

nSpec® PS Cabinet

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Automated Inspection with Human-Level Intelligence

Nanotronics Automation’s loader control software features group and individual wafer handling. The software can save the sequencing in a recipe so you can create repeatable studies. The software also allows you to mark wafers as rejects to speed up your quality control process. The control software keeps wafers safe by reporting and handling all motion control errors.

nSpec® PS Cabinet

Fully Automated Inspection for:

  • Substrate Wafers
  • Epi Wafers
  • Patterned Wafers
  • Diced Wafers
  • Individual Devices
nSpec® PS Cabinet

Features

Multiple magnification settings Rapid scanning Wafer mosaicing Customizable defect reports Settings for single image capture and scans Configuration options for wafer size, defect type, and scan resolution Sample chuck sizes to meet specific needs Automatic wafer loader

With features that automate the inspection process

A device inspection process that compares the image of a die without defects to other dies on the wafer and reports the position coordinates of all dies with defects whether they are random defects caused by particles, or systematic defect clusters caused by conditions of the photomask and exposure process.  The system then generates a defect map report of all defects detected on the wafer.

An AI Analyzer that “learns” which defects to detect and label. The system can be trained to detect defects with as few as 10 samples, the average is 30. Once trained, you can import the algorithm into a production tool and begin automatically classifying defects. The AI analyzer can detect and classify defects on bare substrate, epi wafers, thin films, glass, and any other material with a uniform background.

nSpec® PS Cabinet

Specifications

  • Travel, Typical:

    200 mm X and Y direction

  • Precision Lead Screws:

    2 mm pitch, preloaded ball screws

  • Centered Load Capability:

    2.27 kg

  • Repeatability:

    +/- 5 μm

  • Construction:

    a) Precision ground alum plates b) Stainless steel raceways

  • Step Size:

    0.04 μm

  • Travel Flatness:

    30 μm

  • Weight:

    5.44 kg

  • Limit Switches:

    Mechanical, non-adjustable

  • Wafer Vacuum Chuck (optional):

    Adjustable to 50, 75, 100, 150, 200, or 300 mm

  • White Illumination:

    LED (other options available)

  • Brightfield/Darkfield Objectives:

    5, 10, 20, or 50x, user selectable

  • Differential Interference Contrast:

    (Normarski)

  • Pixel Size, Typical:

    4.54 μm

  • Image Size, Typical:

    2752 x 2200 pixels

  • Maximum Frame Rate:

    17.4 fps

  • Runs one cassette at a time:

    25 wafers/cassette

  • Standard Wafer Sizes:

    75, 100

  • Stage

    Manual user operated

  • Focus

  • Nosepiece

  • Illumination

  • Camera

Available Software Configurations

PioneerSystem
Designed for the inspection of unpatterned wafers, film, and glass.

Fremont + Macro

Wallabout System
Designed to inspect patterned wafers, chips and MEMS.

Pinnacles System
Combines the bare wafer inspection capabilities of the Pioneer System with AI defect detection and the device inspection feature recognition of the Wallabout System for a comprehensive inspection tool.