Macro-scale Critical Dimension Measurements In 3D
The nSpec® uses an automated non-contact point-finding method to quickly determine 3D critical dimensions.
The images below show the critical dimension profile of an aspheric lens. This type of programmable point sampling can be used on a wide variety of substrates, including those with extremely low contrast.
The reporting can be customized to use the metrics important to you. The sample below has best fit coefficients for an even-term 6th order polynomial compared to expected values.