MACRO-SCALE CRITICAL DIMENSION MEASUREMENTS IN 3D
Drawing on a proprietary, non-contact pointfinding method, Nanotronics tools can be used to perform rapid, automated, longrange critical dimension measurements in 3D.
These images show the profile of an aspheric lens, captured on nSPEC®. Nanotronics hardware can project broadly programmable point sampling patterns on a wide variety of substrates, including those, like the surface of this lens, that offer extremely low contrast.
Nanotronics software can be customized to automatically report advanced descriptive metrics on objects scanned. Here, the bestfit coefficients for an even-term 6th order polynomial are reported and compared to their expected values.