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Device Inspection

Inspection for Devices

  • Feature recognition for precise mapping of device alignment layout for easy creation of Golden Templates for patterned wafer analysis
  • Flexible masking and reporting criteria for report of relevant defects by device subregion and proximity to key features
  • Unique software solution to successfully create templates for very large devices,and/or those with the regions of undifferentiated, highfrequency features
  • Seamless, in-software view of annotated virtual mosaic and summary statistics, including overall yield and Pass/Fail results, exportable as .csv and integrated with KLARF and SECS/GEM