nSpec® LS

nspec® LS

nSpec® LS

Combining optical microscopy, computational super-resolution, artificial intelligence, and robotics, Nanotronics is bringing the world’s most advanced microscope to every manufacturing sector.

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The World's Most Advanced Microscope

The inspection system design allows for easy set up of repeated quality control testing, in addition to settings for single image capture or scans. Configuration options include wafer size, types of defects to be identified, and resolution of scan. An optional wafer loader and various sample chucks are available to meet specific needs.

nSpec® LS

Optical Inspection for:

  • Substrate Wafers
  • Epi Wafers
  • Patterned Wafers
  • Diced Wafers
  • Individual Devices
nSpec® LS


Multiple Resolution Settings Rapid Scanning Wafer Mosaicing Customizable Defect Reports Configuration Options for Wafer size, Defect type, and Scan Resolution Sample Chuck Sizes to Meet Specific Needs

nSpec® LS


  • Travel, typical

    200 mm X and Y direction

  • Precision Lead Screws

    2 mm pitch, preloaded ball screws

  • Centered Load Capability

    2.27 kg

  • Repeatability

    +/- 5 μm

  • Construction

    Precision ground alum plates, Stainless steel raceways

  • Step Size

    0.04 μm

  • Travel Flatness

    30 μm

  • Weight

    5.44 kg

  • Limit Switches

    Mechanical, non-adjustable

  • Wafer Vacuum Chuck (optional)

    Adjustable to 50, 75, 100, 150, 
200, or 300 mm

  • White Illumination:

    LED (other options available)

  • Brightfield/Darkfield Objectives:

    5, 10, 20, or 50x, user selectable

  • Differential Interference Contrast:


  • Stage, Focus, Nosepiece, Illumination, Camera

    Manual user operated