December 4, 2019
Epi and Substrate Defect Inspection
Distinguishing between substrate and epitaxial defects is essential to vertically integrated customers and chief suppliers. The differentiation prevents time-consuming investigations of anomalies.
Classification allows customers to identify at which point a defect was introduced—and take definitive action.
nSpec® enables users to create new classifications as the need arises. This gives customers complete flexibility as they develop new materials or change processes.