December 4, 2019

Epi and Substrate Defect Inspection

Distinguishing between substrate and epitaxial defects is essential to vertically integrated customers and chief suppliers. The differentiation prevents time-consuming investigations of anomalies.

Classification allows customers to identify at which point a defect was introduced—and take definitive action with devices like the nSpec Macro.

nSpec® enables users to create new classifications as the need arises during manufacturing. This gives customers complete flexibility as they develop new materials or change processes.