nSpec® PS 300

nSpec® PS 300

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Automated Inspection with Human-Level Intelligence

A sophisticated image processing inspection tool that provides customizability and flexibility, along with reliable, highly repeatable results. The AI-enhanced software can be trained to detect defects with sparse data. Once trained, the algorithm can be imported into a production tool and the user can begin automatically classifying defects and features of interest. The system generates a defect map report of all defects detected on the wafer.

nSpec® PS 300

Fully Automated Inspection for:

  • Substrate Wafers
  • Epi Wafers
  • Patterned Wafers
  • Diced Wafers
  • Individual Devices
nSpec® PS 300

Features

Multiple Resolution Settings Rapid Scanning Wafer Mosaicing Customizable Defect Reports Configuration Options for Wafer Size, Defect Type, and Scan Resolution Sample Chuck Sizes to Meet Specific Needs Automatic Wafer Loader

With features that automate the inspection process

Nanotronics’ loader control software features group and individual wafer handling. The software can save the sequencing in a recipe to give the user highly repeatable results. The software also allows you to mark wafers to speed up a quality control process. The control software keeps wafers safe by reporting and handling all motion control errors.

nSpec® PS 300

Specifications

  • Travel, Typical:

    200 mm X and Y direction

  • Precision Lead Screws:

    2 mm pitch, preloaded ball screws

  • Centered Load Capability:

    2.27 kg

  • Repeatability:

    +/- 5 μm

  • Construction:

    a) Precision ground alum plates b) Stainless steel raceways

  • Step Size:

    0.04 μm

  • Travel Flatness:

    30 μm

  • Weight:

    5.44 kg

  • Limit Switches:

    Mechanical, non-adjustable

  • Wafer Vacuum Chuck (optional):

    Adjustable to 50, 75, 100, 150, 200, or 300 mm

  • White Illumination:

    LED (other options available)

  • Brightfield/Darkfield Objectives:

    5, 10, 20, or 50x, user selectable

  • Differential Interference Contrast:

    (Normarski)

  • Runs one cassette at a time:

    25 wafers/cassette

  • Standard Wafer Sizes:

    75, 100

  • Stage

    Manual user operated

  • Focus

  • Nosepiece

  • Illumination

  • Camera