nSpec® Turbo

nSpec® Turbo
Learn MoreHigh Volume Manufacturing AOI Inspection System
Whatever the user’s specific sample inspection requirements, Nanotronics provides a wide range of manufacturing solutions for obtaining rapid inspection results. The nSpec® Turbo AOI inspection system is the ideal solution for highly controlled, high volume manufacturing environments. This defect detection system runs multiple 300mm high volume scans sequentially. User-friendly software makes configuring recipes next to effortless and as needs evolve, recipes are easy to save and modify.
nSpec® Turbo
This 300mm Design Supports:
- HEPA air filtration
- Air ionizers
- Single or Dual Load Ports (200mm and / or 300mm)
Features
nSpec® Turbo
Specifications
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Weight
1200 kg
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Dimensions (W x D x H)
240 cm x 194 cm x 262 cm
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Min. Vacuum Requirement
21 in. Hg (-70 kPa)
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Power Supply
208VAC, 15A, 50-60Hz
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Min. Clean Dry Air
60PSI (415 kPa)
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Illumination Modes
Brightfield, Darkfield, DIC (Nomarski)
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Light Source
White light LED (other options available)
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Objectives
5x included, 1.25, 2.5, 10, 20, or 50x, user selectable (5 position turret)
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Travel, Typical
350 mm X and Y direction
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Positioning
Linear servo motors with closed loop encoders
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Construction
Precision ground raceways and high rigidity linear guideways
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Mounting Platform
Isolated platform integrated into cabinet system
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Centered Load Capacity
12.5 kg
- SECS/GEM
- OCR: Frontside and/or Backside available
- Air Ionizersº
- E-84 Interface available
- Light Curtains available
- N2 Purge Load Port available