Bare SiC Wafer

  • Rapid optical scans in Brightfield, Darkfield, and DIC Imaging Modes
  • A library of analyzers to automatically detect and classify a wide array of common defect types, e.g. Cracks, Carrots, Octopi
  • Artificial Intelligence algorithms that can create custom analyzers for detecting defects from relatively sparse data sets
  • Seamless in-software view of annotated virtual mosaic and summary statistics, exportable as .csv and integrated with KLARF and SECS/GEM